Automatic Feeding and Discharging Fluidized Bed CVD Furnace

1200°C Dual-Zone Vertical Fluidized Bed CVD (FBCVD) Furnace

1200°C Dual-Zone Vertical Fluidized Bed CVD (FBCVD) Furnace with Automatic Feeding and Discharging System

The ZYLAB Vertical Fluidized Bed CVD (FBCVD) Furnace with Automatic Feeding and Discharging System is designed for continuous chemical vapor deposition processing of powder materials. The system adopts a vertical fluidized bed structure with automatic feeding and discharge, enabling stable gas–solid reactions and uniform coating deposition.

With a maximum sulfurization temperature of 1200°C, dual temperature zones, and an advanced fluidization chamber design, the furnace allows powders to remain suspended in the reaction zone where they react with heated gases to form new materials or coatings. This technology is widely used in lithium battery materials, nuclear fuel particle coating, catalytic materials, and advanced thermal management materials.

Description
SPECIFICATIONS

ZYLAB 1200°C Dual-Zone Vertical Fluidized Bed CVD (FBCVD) Furnace

Introduction:

Working Principle of Vertical Fluidized Bed CVD Furnace:

During operation, the powder sample is placed in the upper sulfurization chamber with controlled temperature. The reaction gas is heated at the bottom of the system and then enters the sulfurization chamber through a fluidized bed distributor plate with pore size of 10–16 μm.

The upward gas flow suspends the powder particles within the heating zone of the furnace, forming a stable fluidized state. The suspended particles continuously react with the reactive gas, enabling uniform chemical vapor deposition or sulfurization reactions.

The furnace tube is made of high-purity quartz, and both ends are sealed with stainless steel flange assemblies, ensuring excellent vacuum performance and reliable operation under controlled atmospheres.

Key Applications：

Lithium Battery Materials

The system enables large-scale preparation of silicon–carbon anode materials, with continuous feeding and discharging capabilities and carbon coating thickness deviation controlled within ±5%. It can also be used for oxide or low-temperature carbon coating of ternary and lithium-rich cathode materials, improving electrochemical stability and cycle life.

Nuclear Fuel Coating

The reactor supports multi-layer coating of TRISO fuel particles, ensuring the dense formation of SiC and PyC protective layers, which effectively isolate fission products under high-temperature conditions.

Thermal Management Materials

Graphene can be grown on alumina particle surfaces to produce high thermal conductivity interface materials used in electronic thermal management systems.

Catalysts and Functional Materials

The fluidized bed structure allows uniform loading of metal active components, improving catalytic reaction efficiency.

Sodium-ion Battery Materials and Environmental Adsorbents

The equipment is also suitable for surface modification of sodium-ion battery materials and functionalization of environmental adsorption materials, making it an important tool for large-scale production of high-performance functional powders.

Features of Vertical Fluidized Bed CVD Furnace：

Automatic Feeding and Discharging System
Equipped with an automatic powder feeding device, enabling continuous operation and improved production efficiency.

Dual-Layer Furnace Structure with Air Cooling
The double-shell design combined with forced air cooling keeps the external surface temperature below 60°C, ensuring safe operation.

High-Efficiency Thermal Insulation
Vacuum-formed refractory insulation materials minimize heat loss and significantly reduce energy consumption.

Side-Opening Heating Chamber
The heating zone features a side-opening structure, allowing convenient installation and replacement of the fluidized bed reactor tube.

Touchscreen Intelligent Control
A 7-inch color touchscreen provides real-time monitoring of temperature, pressure, and gas flow parameters.

Nonlinear Temperature Calibration
Full-process nonlinear temperature correction ensures precise thermal control during CVD processes.

Programmable Process Scheduling
The furnace supports scheduled sintering operations, allowing automated experimental processes.

Multi-Zone Temperature Control
The dual-zone tube furnace structure enables temperature gradients or uniform temperature fields, supporting various CVD reaction conditions.

Technical Specifications:

Equipment Model	FBCVD1200-80
Maximum Heating Rate	1–20°C/min
Rated Power	8 KW
Thermocouple Type	K-type
Maximum Temperature	≤1200°C
Rated Temperature	1150°C
Furnace Chamber Size	Φ150 × (300 mm + 300 mm)
Furnace Insulation	High-purity polycrystalline fiber composite refractory
External Dimensions	1105 × 435 × 665 mm
Vacuum System	Dual-stage rotary vane vacuum pump
Control System		Embedded control system with 7-inch color touchscreen and bilingual graphical interface, supporting nonlinear temperature correction and intuitive operation. The controller allows storage of 15 programmable heating profiles with up to 30 segments each, enabling flexible process control. Built-in safety features include over-temperature alarm, thermocouple failure warning, and leakage protection.
Temperature Accuracy	±1°C
Heating Elements		Mo-doped Fe-Cr-Al alloy
Sealing Flange Structure		Stainless Steel Water-Cooled Sealing Flange
Material Collection System		The furnace is equipped with a dual-stage stainless steel powder separator with a separation efficiency of ≥95%, ensuring effective recovery of fine particles during the fluidization process.
Feeding System		Automatic Powder Feeding Device
Furnace Tube Material		High-purity quartz tube
Gas Preheater（Optional）		An optional 316L stainless steel gas preheater is available for weakly corrosive gases. Maximum preheating temperature: 600°C Suitable for corrosive or special process gases Provides stable gas temperature before entering the reaction chamber
Net Weight	Approx. 200 kg
Warranty	18 months(not including consumable parts, such as quartz tube, heating elements, thermocouple), lifetime support.